Key Assets

• Applied Materials Centura 5200 Oxide PECVD TEOS System w/ 3 X DLH DCVD, 1 X Multi-Slot Cool Down & 2 X NB LL Chambers & HP Robot, 1996 built, 200mm wafer size 
• Applied Materials Centura 5200 Tungsten PECVD System w/ 4 X WxZ WCVD, 1 X Multi-Slot CD & 2 X NB LL Chambers & HP Robot, Gases – WF6 & SiH4, 1996 built, 200mm wafer size 
• Two (2) TEL Unity EP Tin PECVD System w/ 4 X Unity EP TiN, 2 X Cool Down & 2 X LL Chambers (TiCl4 Process for TiN SFD & CVD), 2004 & 2001 built, respectively, 200mm wafer size 
• Two (2) TEL Unity EP PECVD CVD TiN System w/ 4 X TiN & 2 X Cooling Modules, 2004 & 2001 built, respectively, 200mm wafer size 
• TEL MB2 730 Tungsten Si PECVD WSix CVD System w/ 2 X CVD Chambers, Gas Lines: WF6, ClF3, DCS & Ar, Dry Pump Models: 2 X Ebara AA30Nv1-H & 2 X Ebara AA10Nv1-H (SMIF) 
• Eaton/Axcelis Fusion Gemini GPL 220 IP Resist Ashing System w/ 2 X Quartz Process Chambers, 2005 built, 200mm wafer size 
• Three (3) TEL Unity lle 85 TPA PO Nitride Etch Systems w/ 2 X Etch, 1 X ATC, 1 X PA, 1 X Transfer & 2 X LL Chambers, 200mm wafer size (two 1996 built, one 1997) 
• Three (3) TEL U2e – 855SS Oxide Etchers, 2001 & 2004 built
• TEL Mark 7 Coater/Developer, Coat(2)/Develop(2) Track, Other Stations: 2 X ADH, 7 X CPL, 4 X DHP, 6 X HP, 2 X WDS & WEE
• Seven (7) DNS SSW-80A-AR Wafer Scrubbers with Nano Spray, 1993 to 1997 vintage, 200mm wafer size
• Two (2) Hitachi M-511AE Microwave Plasma Poly Etch System w/ 1 X Etch, 1 X Ashing & 1 X Transfer Chambers & 3 X Load/Unload Ports, Gases – Cl2, HBr, SF6, CHF3 & CH4, 1997 vintage, 200mm wafer size
• Two (2) Shibaura μ ASH 8100W Resist Ashing/Stripping System, Gas Lines: O2, CF4 & N2, RF Generator Type: Daihen SGP-10B, Mas Flow Controllers Type: Aera, Cassette: 26 Slots, Dry Pump Models: Ebara AA70WNv1 & AA10
• Three (3) Novellus PEP IRIDIA Strippers, 2005 vintage 
• Two (2) KLA- Tencor Eagle Patterned Wafer Inspection Systems, 2001 vintage
•  Plus:  Novellus Iridia Strippers, Blue M Ovens, Nanometrics Overlay, WJ 1000T, CD SEM, Inspection Tools, Film Thickness tools and much, much more!