Key Assets

Major Global Webcast Offering of Late Model Silicon Carbide Semiconductor Manufacturing and Test Equipment No Longer Required by SemiSouth Laboratories, Inc.

EPI BAY

• Wafab Aco Wet Bench, 8′ (RCA1 & 2), Model 96″” PVC-C Rear Access Wet Bench, s/n 13615-01
• STS Sitek Stacking Rinser Dryer (SRD2A, 2B)
• STS Sitek Stacking Rinser Dryer (SRD1A, 1B)
• STS Sitek Semitool ST-870, Spray Solvent Tool, Model SSTC421280, s/n F72215
• Wafab Wet Bench Solvent Hood, Model 96″”, SST Rear Access Wet Bench, s/n 13616-01
• Double Sided Coating Track, Model 1-TRK-1/8838/8844/8826/8836/8844/I
• Double Sided Developer Track
• Metro Cart
• Nikon Optiphot 150
• (3) Stainless Steel Work Benches,(3) Metro Carts, (2) Flammable Storage Cabinets
• Chemical Distribution, IDI Pumpless Pumps
• Sitek Mask Cleaner
• Mask Storage Cart
• Napco Precision Scientific Vacuum Oven, Model 5851, 35 Degrees C – 200 Degrees C, S/N 9407-007
• 2002 Karl Suss MA-6ABA6 Mask Aligner, S/N 579, Type 167330,
• Nikon Optiphot
• 1997 Canon FPA-3000i 4, Fine Pattern Aligner,Stepper (Refurbished/Rebuilt in 2009)
• Miscellaneous Stainless Steel Work Benches, Metro Rack,
• Nikon Scope w/ Cohu Camera
• OSI Video Linewidth System
• (2) Stainless Steel Leveling Vibration Tables, ULTRACLN Series, Model 2144CI

DEP/ETCH BAY

• 2006 Temescal BJD-2000 E-Beam Evaporator, S/N 351, 208 Volt, 3 Phase, 65 KVA, 1500lbs
• CHA Slim 50 E-Beam, Evaporator, w/ Veeco Solus Ion Source Controller, Sycon STC-2002 Thin Film Thickness Deposition Controller, Sycon EBS-530 Programmable Sweep Controller, Inficon CI-100 Indexer, Veeco 3cm, DC Ion Source, Filament Cathode (ITI)
• CHA Slim 50 E-Beam, Long Throw System Evaporator, w/ Veeco Solus Ion Source Controller, Sycon STC-2002 Thin Film Thickness Deposition Controller, Sycon EBS-530 Programmable Sweep Controller, Inficon CI-100 Indexer, Veeco 3cm, DC Ion Source, Filament Cathode (ITI)
• Nanospec/AFT Microarea Gauge w/ Olympus Base
• Nanospec/AFT 4000 Visible, Model 7000-0401, Rebuilt, S/N 0297-H10671-4101
• Motic Dual Microscope w/ Base & Motic MLC-150C Illuminator
• Zeiss Axiotron Scope, w/ Newport Benchtop Vibration Isolation w/ ROI 150 Illuminator
• Tencor P-2 Long Scan Profilometer
• Tencor P-11 Surface Profilometer, S/N 09960159
• 2011 PRO-CVD, S/N MP-0692, Teus 2, No. 000026
• 2011 STS Etcher 3, S/N PH10070-1, TI # 00027
• 2011 STS Etcher 4, S/N P.069, TI # 000025
• 2007 STS Etcher 2, S/N PT022, Stock #AS318775-5

EPI BAY

• 2009 Jeol SEM Model JSM-6701F, Field Emission Scanning Electron Microscope, S/N SM-67010BU, 2009
• Olympus BHM Microscope
• 2004 Hitachi Model S-3400N SEM, S/N 340508-10
• Hitachi S-8840 Series CD Scanning Electron Microscope, s/n 9116-04
• Total Fab Solutions Heatpulse 610 Manual RTA Rapid Thermal Annealer
• T-M Vacuum Products Annealing Oven, V/1G1206-24, Model SS1206NS-14, S/N 07-10030707, 80-100 PSIG, 1/4 GPM, 208 Volt, 3 PH, 60 Cycle, 50 Amp
• 2011 Nanometrics Stratus FTIR Wafer Thickness Tool, RS2000 System Core, 7000-038688 Rev1, s/n STRATUS-1111-0019, 120 Volt, 50-60 Hz, 1200VA
• 2005 SSM Solid States Measurements, 495 Mercury Probe CV System, S/N 210
• 2011 Aixtron Planetary Reactor, Gas Foil Rotation, (EPI3), Type AIX-2800G4 WW, S/N 1001-701401, 208/120V, AC, 3 Phase, 4 Wire + Ground, 28 KVA, 50/60 Hz
• 2011 Centrotherm Model Activator 150-50 Anealing Oven, Project # 1_52573.11, 115 KW, 140A, 3-480V, 60 Hz
• 2005 Aixtron Model VP2400HW Gas Foil Rotation Planetary Reactor, S/N 10001-700112, 20 KVA (Upgraded, Refurbished 2011
• 2007 Tystar Tytan Diffusion Furnace, 6″ Tube, Mini Tytan 4600, S/N 460107FUR, 480 Volt, 55 KVA, 76 Amp, 60 Hz
• NTA Vibration Table
• DS Screen Track (Not In Service)
• 2000 KLA Tencor ILM-2138, Model KLA2138-1S, S/N W21XX1266, w/ Model KLA2138-VI
• Miscellaneous Stainless Steel Tables, Metros,(18) Assorted Lab Stools

DICING ROOM

• Laurier Model DS-7000 Pick & Place, S/N 4178
• 2006 August Rudolph Technology NSX-95 Automated Defect Inspection System
• 2010 Allwin Corp Refurbished GaSonics Aura 1000 Asher, S/N 0393232A
• K&S Model 960-6
• Miscellaneous in Dicing saw room
• Movin-Cool portable air conditioning unit
• Allied Techcut 4
• Olympus BH-2 Scope
• Allied M-Prep B
• Lapmaster 20 w/ Spare Polishing Wheels
• Wafab Wet Bench Model 48″, PVC-C, s/n 13948-01
• Wafab Lid Cleaner, Model 36″, PVDF Front Access Wet Bench, s/n 13846-01
• SSM H90i CV System

CHASES & MEZZANINE

• Ciphercon 1500 Gas Cabinets throughout the facility, (2) Ciphercon 1500 VMB, Ciphercon 1000 Mini VMB-HF including (3) SDC Simplicity Gas Panels, (8) SDC Microline Panels
• (3) Complete Craftsman Toolboxes
• Upstairs Maintenance & Spares
• (2) Varian Mass Spectrometer Leak Detectors, Model VSM D301, s/n LL1106L076″(2) Kaeser SMII Air Compressors
• Sullivan Palatek 30DVFD Air Compressor, w/ (2) Sullivan Palatek Driers, Model SPRF-14SA-116
• DI Water System
• (2) Dekker Vmax Vacuum Pumps
• Miscellaneous Hallway Cabinets, Ladders, Toolboxes, Carts, Refrigerator, Pallet Jack, Hand Tools & Outside & Cleanroom Prep, Cleanroom Vises

LAB

• Tektronix TDS 7054 Digital Phosphor Oscilloscope
• Lindberg Blue M Oven
• Yamato Oven, DKN810
• Lindberg Blue M Oven
• ASL – Model ASL-1000 Analog Test System
• (3) Electroglas 2001CXE Probers
• Meiji Micromanipulator, w/ Vibration Isolation Table
• Test Rack: Agilent 4284A LCR Meter Agilent E4980A LCR Meter (2) Keithleys Miscellaneous
• Agilent 4155C Semiconductor Parameter Analyzer
• Athena Quiet Chuck DC Controller, 490B
• Orthodyne Electronics Prober
• Miscellaneous In Lab, including all workbenches, toolbox, Metro carts, Test Equipment Dry Box, and related Support Equipment
• Exactron
• Agilent 16960A (7+)
• HP 83480 A Digital Communication Analyzer
• Agilent 8563EC Spectrum Analyzer
• HP 8722C Network Analyzer
• Agilent E4440A Spectrum Analyzer (4)
• Agilent 8720ES Parameter Network Analyzer
• Agilent N5230C Network Analyzer
• Agilent E8361C Network Analyzer
• Tektronix TDS 7704B Oscilloscope