Key Assets

THESE ASSETS WILL BE INCLUDED IN AN UNCOMING AUCTION –  if not sold in pre-auction period prior to the auction.

ALL ASSETS LOCATED AND AVAILABLE FOR INSPECTION IN MICHIGAN

• Two (2) CHA Industries Mark 40 Evaporation and Sputtering Systems –  2000-2001 vintage, upgraded with new accessories in 2010

***(See additional E-Beam evaporator unit detail below, with detailed photos and additional descriptions in our online catalog)****

• One (1) 2008 built VPT Sputtering System
• Two (2) Oerlikon/ELS EK 008 Diffusion Pumps

ADDITIONAL E-BEAM EVAPORATOR INFORMATION:

CHA Mark 40 UNIT – LOT # 24

• Chamber 26 inch x 26 inch
• Telemark 272 E-gun (15 cc, 6 pockets) with SR-10 power supply
• Telemark sweep controller
• KRI eH-200F ion source with 3 UFC-8100 MFCs
• Ion Tech RFB-1200 ion source
• On-Board cryo pump (not attached)
• CTI cryo compressor (model 9600)
• Alcatel ADS-501 rough/roots pump with 5 µm particle filter
• I/C-5 deposition controller
• Siemens touch screen computer with Windows NT

CHA Mark 40 UNIT – LOT #26

• Chamber 26 inch x 26 inch
• Telemark 272 E-gun (40 cc, 4 pockets) with SR-10 power supply
• Niles sweep controller
• KRI eH-200F ion source with 2 MFCs
• Thermal source (co-dep with E-gun)
• Pfeiffer turbo molecular pump
• 2 units of Alcatel ADS-501 rough/roots pump with 5 µm particle filter
• I/C-5 deposition controller
• Siemens computer with Windows NT

VPT (Vacuum Process Technology) Sputtering System

• Extremely versatile thin film prototyper
• Tool has its own custom built glove box – eliminates the need for controlled laboratory environment or clean room
• Multiple sources in a chamber up-equipped – ample power
• Ability to process multiple layers – multiple sources and targets

• 8 thermal sources
• 1 sputter gun (3”)
• RF sputter supply (not attached)
• Cryo-Torr cryo pump
• CTI cryo compressor (model 8200)
• I/C-5 deposition controller
• 3-glove M-Braun glovebox (O2, H2O circulation)
• 2 Alcatel rough pumps