Solid-State Microbattery Manufacturing Equipment: CETRAC & Yasui Seiki Roll-to-Roll Systems, MRS Technology Photolithography Cluster, Edwards Vacuum Pumps & More!

Roll-to-Roll Process Equipment

• CETRAC integrated wet-process train
• Yasui Seiki CAD-S3.26 precision R2R coating, laminating, interleaf-peeling and rewinding system
• Northfield BL-06003 enclosed R2R processing cell
• NxQ 9000 enclosed R2R laser system
• Chemcut/Northfield BL-04973 R2R wet-processing, etch system
• Northfield/CTM BL-04832 R2R web converting system

Vacuum & Deposition Systems

• Integrated vacuum coating/deposition system
• Edwards Vacuum iXH1220H dry vacuum pump and tool package

Photolithography & Cleanroom Process Equipment

• MRS Technology automated photolithography cluster
• Tamarack Scientific 152R mask aligner
• SSE OPTIwet ST30 automated wet-processing/spin-coat
• Grünig-Interscreen G-WASH 104 A2 automated substrate washer

Laser Systems

• Suzhou Delphi Laser FPS02 nanosecond laser micromachining system

Thermal & Wet-Chemical Process Equipment

• Amerimade custom wet-processing bench with integrated Uvitron/SunBelt UV-curing subsystem
• DEK enclosed screen/stencil-printing machine

Inspection, Metrology & Analytical

• Automated RFID inspection and labelling system
• XRF analysis system
• QC Optics API-1100 FP flat-panel optical inspection platform
• EXFO Acticure 4000 UV-curing controller with traverse/exposure fixture

Ancillary Process Equipment

• MTI/KJ Group MSK-800W ultrasonic welding machine

Test & Measurement Rack

• Agilent 4294A precision impedance analyzer (40Hz–110MHz)
• Agilent 8753ES S-parameter network analyzer (30kHz–6GHz)
• National Instruments PXIe-1071 populated PXI chassis (with PXIe-8820, PXI-5412, PXIe-5105, PXIe-4143 modules)
• Copper Mountain TR1300/1 network analyzers
• HP 8648C RF signal generator (100kHz–3.2GHz)
• HP 4285A precision LCR meter (75kHz–30MHz)
• Teledyne LeCroy WaveSurfer 3024 oscilloscope (200MHz, 4GS/s)
• Rigol DSA815 spectrum analyzer
• Agilent E3647A dual-output DC power supplies
• HP 33120A function/arbitrary waveform generator
• HP 8116A/6202B pulse/function generator and DC power supply
• HP 8447F amplifier (9kHz–1.3GHz)