Solid-State Microbattery Manufacturing Equipment: R2R Photolithography, ALD/PVD Deposition, Rapid Thermal Processing, Laser Systems & More!

Roll-to-Roll (R2R) Process Equipment

• Yasui Seiki CAD-S3.26/M/CL/2.7H R2R Lithography Coating System
• Neutronix-Quintel NxQ 9000 R2R Lithography Exposure System
• Chemcut SA2315D R2R Lithography Develop & Drying Line
• Cemco LA0733 R2R Aluminum Etch, Resist Strip & Dryer/AOI Processing Line (IMP)
• Cemco LA0732 R2R Tungsten, Aluminum, HF & BOE Etch/Cleaning Line w/ Dryer/AOI (IMP)
• SMIT 750°C RTP-DH R2R Rapid Thermal Processing System
• SMIT F1287 R2R RTP Activation Line w/ Emerson & Renwick Winder/Unwinder & Siemens HMI (IMP)
• Pinnacle 18-017 Thin-Film Unwind/Rewind Module
• Hamar Laser L-732WW Dual-Scan Precision Roll Alignment System
• Singulus IMPEDIO Roll Wind/Rewind System w/ FISCHERSCOPE X-RAY 4000 In-Line XRF Measurement

Roll & Material Handling

• (4) RONI Lift-O-Flex 19000 Powered Roll Handlers
• Vestil Powered Material Lift

Vacuum, ALD & PVD Deposition Systems

• Beneq P400A-028 Atomic Layer Deposition System
• Beneq P400A-034 Atomic Layer Deposition System
• Emerson & Renwick W.O. 32077 R2R Atomic Layer Deposition (ALD) System
• Emerson & Renwick W.O. 32081 R2R PVD Sputter Deposition System
• Leybold V-Series Vacuum Pump Package
• (2) Thermal Technology 3629C-V High-Temperature Vacuum Annealing Furnaces

Photolithography & Cleanroom Process Equipment

• MRS Technology 5200G/I Process System
• MRS Technology 5200G/I Gen 2 Panel Lithography/Printing System
• Tamarack 152R Mask Aligner and Exposure System
• SSE OptiCoat ST60+ Spin Coating System
• SSE OptiWET ST30 Wet-Process System
• Grünig G-Wash 112 Developing Machine
• Grünig G-Wash 104 A2 Washing Machine
• Grünig G-Dry 571 Drying Cabinet

Laser Systems

• Jenoptik VOTAN Semi 700 Laser Processing System
• Delphi Laser FPS02 Nanosecond Laser Micromachining System
• 3D-Micromac microFLEX TMS R2R Laser Processing System
• (2) TRUMPF TruMicro 7240 Laser Units

Thermal & Wet-Chemical Process Equipment

• TPS Blue M Industrial Oven
• Allwin21 AccuThermo AW610 RTP System
• Musashino Kikai USG-206 Filtered Air Generator
• Cool Clean Technologies Omega 1500-A CO2 Snow Cleaning System
• Keith K16-12-20-B Hardening Furnace
• DEK Galaxy Automated Stencil Printer
• Amerimade 6FT-WPS-SS Stainless-Steel Wet Process Station
• (2) Amerimade 6FT-WPS-WPP Polypropylene Wet Process Stations
• Modutek DMS Acid Etch/Clean Wet Bench
• MicroTech Systems KOVIO IPA Vapor Dryer
• Dual-Chamber Industrial Washer/Dryer System
• Oxford Instruments Plasmalab 800 Plus RIE-PE Plasma System
• (2) Oxford Instruments Plasmalab 880 PECVD Systems
• PVA TePla Thin Films Electronics Plasma Processing System
• Allring RK-MP50 Rotary Plating Machine
• Integrated Circuit Development Aquarius HEATEFLEX Temperature Control System

Inspection, Metrology & Analytical

• QC Optics API-1100FP Optical Inspection/Measurement System
• Nikon VMR-6555 Video Measuring System
• SPEA CT1000 Identification IC Tester
• SPEA CT3000 Electronic Test System
• Toho FLX-2320-S Dual-Wavelength Thin-Film Stress Measurement System
• Mark-10 Motorized Tensile/Force Test Stand
• (2) Nikon Eclipse L200D Industrial Inspection Microscopes
• Keyence VHX-600E Digital Microscope w/ Tevet UV-Visible Inspection System
• Nordson DAGE Series 4000 TPAXY Bond Tester
• Karl Suss PA300 Semiautomatic Probe Station
• Cascade Microtech 9000 Probe Station w/ Leica S6E Microscope
• Bird Semiconductor Calibration Cart