Silicon Carbide (SiC) Wafer Manufacturing Equipment: Crystal Growth Furnaces, Wafer Inspection Systems, Vacuum Furnaces, Wire Saws, Wet Processing & More!

Wafer Testing & Inspection

• KLA Candela 8520 Wafer Inspection System (2022)
• Rigaku TXRF3760 Total Reflection X-Ray Fluorescence Spectrometer (2023)
• Corning Tropel UltraSort II FlatMaster Semi-Automated Wafer Sorting System (2022)
• Bruker ContourGT-X3D Optical Profiler (2022)
• Semilabs Non-Contact Eddy Current Resistivity Mapping Wafer Tester (2022)
• Lam Research OnTrak DSS200 Series 2 Wafer Cleaner
• NADA Technologies 6-Station Wafer Sorter
• Hologenix Magic Mirror Wafer Defect Detection System

Cutting, Grinding & Polishing

• Meyer Burger DW288S4 Wire Cutting Saws (2021) (2)
• Takatori WSD K3 Wire Saw (2022)
• Daitron WBM-2200A Wafer Edge Grinder (2022)
• Agie Charmilles Cut P 550 Pro Electro Discharge Machine / EDM (2022)
• Studer Favorit Grinding Machine (2022)
• DCM Tech IG 282 SD Rotary Surface Grinder
• GigaMat 3828-46 CMP Polishers (2)
• GigaMat 3806-L Polisher w/ Water Jet Pad Dresser
• PR Hoffman Servo RS-5400 Polisher

Wafer Marking & Etching

• InnoLabs IL-1000 Wafer Marking System (2022)
• EpiQuest KOH ETC-6001F SiC Wafer Etching System

Vacuum Furnaces

• GFS 3636 Horizontal Vacuum Resistance Furnace; Max Temp: 2,000°C
• GFS 2448 Single Chamber Horizontal Vacuum Resistance Furnace; Max Temp: 1,200°C

Crystal Growing Furnaces

• Aymont SP-150 Induction Heated Growth Furnaces w/ Mesta Electronics 50kW Inverters (Multiple)
• CVD Physical Vapor Transport Systems (Multiple)

Chemical Wet Processing

• RENA 4-Bay Multi Chemical Wet Bench (2022)
• Compass Spin Rinse Dryers (2022) (3)

Facility Support & Electrical

• Generac MD750 750 kW / 937 KVA Diesel Generator Units w/ Transfer Switch (2)
• Vertiv 55BP400XYG1B9CG UPS System (2019)